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还有一个其实也相关的新闻“SK 海力士将于今年底实现 375 层 NAND 的量产,并导入钼材料”。
用钼(Mo)代替钨,讨论一直有,SK的量产也代表一种趋势。
这次的产品原本是400 层级,后来修正为 375 层。NAND 闪存通过垂直堆叠数百层存储单元及其控制字线来提升容量;在 375 层产品中,SK 海力士决定在金属栅电极(即字线)中,将部分钨替换为钼。
在高层堆叠 NAND 结构中,钼被视为可以克服钨限制的材料。随着层数上升,线宽变窄,钨在超细结构中的电阻随尺寸缩小而上升,导致信号传输变慢。钼在细线字线结构中的电阻低于钨,有利于加快信号传输,从而提升写入和擦除速度。
此外,钨在沉积前需要先形成阻挡衬里层,每增加一层都会带来有效厚度的损失;而钼可以在无需该辅助层的情况下直接沉积,有助于实现更高密度结构。
不过,引入钼的工艺本身技术难度不低。钼前驱体在室温下为固体,需要通过加热并稳定供给的技术,才能以稳定的流量和用量进行供应。
三星电子则已在其第九代 286 层 3D NAND(于 2024 年 4 月进入量产)中导入钼金属布线。其下一代第十代 3D NAND(层数超过 400 层)计划在今年下半年实现商品化,且三星正在扩大采用钼的工艺步骤数。
用于 3D NAND 的钼材料需求预计将快速增长。业界估计,三星在去年采购或将采购约 4 吨钼,今年约 10 吨;到 2027 年预计增至 25 吨,2028 年 40 吨,2029 年 60 吨,2030 年 80 吨。预计从明年起正式导入钼的 SK 海力士,初期年用量约为 4 吨。