一场钨的出口限制将引发WF6的缺乏。


两家日本厂(关东电化+中央硝子)合计 WF₆ 产能约 2000–2200 吨/年,占全球供应约 25%。而他们因为缺少原材料,从6月底开始停产WF6。
六氟化钨是 CVD/WCVD 工艺沉积金属钨的核心前驱体,用于接触孔填充(via fill)、金属互连、DRAM 电容和 3D NAND/HBM 结构中的钨层。
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