China-made immersion DUV lithography machines have started small-batch production; the first batch will deliver 5 units this year

PANews July 27日消息, according to The Information, a state-owned enterprise-backed company in Shanghai has begun small-batch production of domestically made immersion DUV lithography machines. This year, it plans to ship about 5 units, increasing to about 20 units by 2027. The first batch of equipment will be delivered to Semiconductor Manufacturing International Corporation (SMIC), Hua Hong Semiconductor, and CXMT. Semiconductor fabs will need to verify precision, stability, and integration with existing production lines; the process may continue for months or even longer. The report says that most components of the equipment have been localized, but some key parts still rely on Japan. Overall performance and manufacturing quality still lag behind ASML. In 2025 alone, ASML delivered about 131 immersion DUV lithography machines, and China’s domestic equipment still has a gap before large-scale replacement.