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Domestic immersion DUV lithography machines have started small-batch production; this year’s plan is to deliver about 5 units.

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Mars Finance News: According to The Information, citing sources familiar with the matter, an undisclosed Shanghai state-owned enterprise-backed company has begun production of domestically made immersion DUV lithography machines. It plans to manufacture about 5 units this year, increasing to about 20 units by 2027. The first batch of equipment will be delivered to major wafer fabs, including Semiconductor Manufacturing International Corporation (SMIC), Hua Hong Semiconductor, and CXMT, but the equipment still needs to undergo verification for precision, stability, and production-line compatibility. This process may take several months or even longer. At present, most components of the equipment come from domestic sources, but some critical parts still rely on Japan, and its performance and manufacturing quality lag behind ASML. For comparison, ASML delivered about 131 immersion DUV lithography machines in 2025 alone. Although domestic equipment has already made the leap from prototype testing to small-batch production, there remains a clear gap before it can massively replace ASML. Earlier, Reuters reported that the U.S. is considering further tightening restrictions on exports of optical lithography equipment to China and limiting repair services in China. The delivery of this domestic equipment comes amid that backdrop.
SMIC-2.19%
ASML-5.75%
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