TechFlow Deep Tide message. On July 27, citing sources familiar with the matter, The Information reported that a Shanghai state-owned enterprise has started mass production of its self-developed deep-ultraviolet lithography equipment and plans to produce about 5 units in 2026 and expand to about 20 units in 2027. The report said the batch of equipment is intended to be delivered to domestic chip manufacturers including Semiconductor Manufacturing International Corporation (SMIC), HuaHong Semiconductor, and CXMT. CXMT Storage may become one of the first customers.



This move is seen as a milestone in China’s localization substitution of semiconductor manufacturing equipment, but there remains a clear gap in overall production capacity compared with ASML.
SMIC-0.98%
ASML-5.75%
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